ZENOPS Technical Center

F-Theta Lens Technical Note.

F-Theta Lens Historical Background.

After the invention of the laser in 1960, Cutting, marking, and drilling of various materials began to be processed. In the beginning the material was loading on a conveyor or stage where the material was moved directly and processed. There was no problem those days. But due to the advancement and mass production, it took a long time to process and the space occupied by the stage was larger depending on the object. To overcome these weaknesses, scanner has now been developed to tilt the X-Y Galvanometer mirror with motor to deliver laser beam in multiple directions. The f-theta lens has been developed for the correction to (curvature of image field) aberration of lenses that occur when the beam is collimate to the plane through the scanner.

Technical Overview

The F-theta lens is used for laser cutting, marking, drilling, lift-off, engraving and welding application. It is used with the X-Y Galvanometer is a scanning lens used to collimate laser beams on a plane. It is a specially designed lens that linear the laser beam at a theta angle to provide a nearly constant spot size within the scan field. ZENOPS's F-theta lens uses cutting edge technologies in ZProTEC¢â apply to laser applications of wavelengths range from 257 nm to 1064 nm. The application of high-quality fused silica lens provides an optical solution that optimal for demanding market needs. Our products are optimized and used in various industries such as follows.


- Applied in various industries electric car, vision, medical, semiconductor, research, etc.


Figure 1. Laser system with the F-theta Lens

Type of Lens and Technology Principles

Standard:

The curvature of the F-theta lens is specially designed using multiple lenses to ensure a constant plane of view. The laser beam coming into the f-theta lens is refracted from each lenses and redirected toward the focus of the scan field. Designed the spacing and curvature of each lens can be applied to optimize for a specific wavelength and DOF. It makes a wide scan field, more precise application of the laser beam according to the process. lenses are generally AR coated to minimize the energy lost due to the back reflection. In addition, the optimized coating according to each wav elength has enable to more efficient process by increasing the transmission. ZENOPS's F-theta lenses are applied reliably in the most high-precision industries.


Figure 2. Standard Lens


Telecentric:

Telecentric f-theta lens is specially designed to constant the spot size and beam shape throughout the work area, or to minimize distortion when it is difficult to ensure accurate distances in the process. It is unlike standard lens, the laser beam and scan field in the scanning range almost vertically, allowing for more constant spot and resolution compared to the standard. The "Telecentric error" item mentioned in the ZENOPS datasheet is the maximum error perpendicular to the work plane. This value becomes larger as beam goes to the periphery rather than the center. To achieve optimal telecentricity, ZENOPS has designed an ideal mirror layout and curvature, designed to be located in the center of the X-Y scan mirror, and manufactured a lens with minimal distortion through various field tests



Figure 3. Telecentric Lens
As for the Spot Properties

The Spot properties mentioned in the data sheet of ZENOPS, represent changes in the Spot diameter in their colors in the field. The change in color is from the smallest value to the largest value based on to the category, and the scale on the axis represents the working position and origin. The Beam diameter varies depending on the laser quality factor M©÷ and the incident motion, and M©÷ is set to 1 and multiplied by the actual M©÷ to represent the estimate. The spot diameter is a diameter containing 86.5% (1/e©÷) of the pulse laser power. Through the following example to see the specification provided by Spot properties. Through the following example to see the specification provided by Spot properties.




Example: ZENOPS Spot properties of 64SD450U220

¡Ü The Spot size is simulation result, the actual spot size will be subject to material property and working condition etc.
¡Ü Spot radius in ¥ìm at 86.5% level for a Gaussian laser beam (M©÷=1) with 30.0 mm diameter at 1/e©÷, clipped at 1/e©÷ 30.0mm
¡Ü Field size and mirror distances as given above for 2 mirror scan system.
¡Ü PRAM parameters: mechanical mirror scan angle
¡Ü This product does not have color difference correction applied.

The Material of Lens

The F-theta lens is usually made of high-quality optical materials such as fused silica or quartz to maximize transmission and minimize beam distortion. Fused silica has a lower coefficient of thermal effect which are also enough to used as windows for airplane and spaceship than other glass materials. It is used to minimize the thermal effect of the laser beam. All of ZENOPS's lenses including F-theta lens and object lens, apply specially designed by ZPrOPS¢â technology to minimize thermal damage while increasing transmission. In addition, all materials had been RoHS certified.


Composition of F-theta Lens

Most of the ZENOPS's F-theta lenses are assembly with between two and six lenses element. Lenses are determined by an optimized design based on the application and provided with a protective cover window to protect against the external environment for a long time.



Figure 5. Composition of F-theta Lens

Back Reflection

The last chapter on the ZENOPS data sheet contains information about the back reflection. Please refer to your system design through description of each item below.




Figure 6. Back reflection


¡Ü Please refer to the above data when installing this product and apply it to the scanner.
¡Ü This contents is not an essential part of the guarantee, so please use it as a reference.
¡Ü Please contact the scanner manufacturer for the objective mount kit and correction file.

ZENOPS Data sheet

The latest ZENOPS data sheet defines the specification of each F-theta lens. We hope to assist you design your ideal system, and if you need a type of product that is not defined in Standard lens, please contact us. We are proposing that the best product to our customer with an optimized customization design. The ZENOPS's data sheet contains the following items for your system design.


¡Ü Lens Image
¡Ü Key Features
¡Ü Outline Dimension
¡Ü Basic structure of F-theta lens
¡Ü Optical Parameter
¡Ü Spot Properties
¡Ü Certain Mirror Spacing & Back reflection point.